Specification
|
Component |
Concentration |
Balance |
|
Ammonia |
10-500 ppm |
Air or Nitrogen |
|
Chlorine |
2-1000 ppm |
Nitrogen |
|
Carbon Monoxide |
10-2000 ppm |
Air or Nitrogen |
|
Ethylene Oxide |
5-100 ppm |
Nitrogen |
|
Hydrogen Cyanide |
5-20 ppm |
Nitrogen |
|
Hydrogen Chlorine |
3-1000 ppm |
Nitrogen |
|
Hydrogen Sulfide |
5 ppm - 1% vol. |
Air or Nitrogen |
|
Nitric Oxide |
5-900 ppm |
Nitrogen |
|
Nitrogen Dioxide |
3-200 ppm |
Air or Nitrogen |
|
Phosphine |
0.5-15 ppm |
Nitrogen |
|
Silane |
5-10 ppm |
Nitrogen |
|
Component |
Concentration |
Balance |
|
Benzene |
1-5 ppm |
Air |
|
Butane |
10 ppm - 0.9% vol. |
Air |
|
Carbon Dioxide |
50 ppm 100% vol. |
Air or Nitrogen |
|
Ethylene |
10 ppm -1.35% vol. |
Air |
|
Helium |
100% vol. |
N/A |
|
Hexane |
10 ppm- 0.48% vol. |
Air |
|
Hydrogen |
10 ppm -2.0% vol. |
Air or Nitrogen |
|
Isobutylene |
10 ppm - 100 ppm |
Air |
|
Methane |
10 ppm - 2.5% vol. |
Air or Nitrogen |
|
Methyl Chloride |
10 ppm -300 ppm |
Air |
|
Methylene Chloride |
10 ppm -200 ppm |
Air |
|
Oxygen |
0.4% - 100% vol. |
Nitrogen |
|
Pentane |
10 ppm - 0.75% vol. |
Air |
|
Propane |
10 ppm - 1.1% vol. |
Air |
|
Propylene |
50 ppm - 5.6% vol. |
Nitrogen |
|
Toluene |
10 ppm - 100 ppm |
Air or Nitrogen |
|
Zero Air |
20.9% Oxygen |
Nitrogen |
|
Nitrogen |
100% vol. |
N/A |